High Purity

When it comes to quality, performance and reliability, there’s no better value in high purity pumps than Yamada. With over 35,000 units operating globally, Yamada IS THE industry standard for high purity. If you are concerned about maximum corrosion resistance, the best purity levels, low particle generation and ionic contamination, you need to take a closer look at Yamada High Purity Pumps.

• Diaphragms, liquid chambers and manifolds machined from 100% virgin PTFE
• Short stroke technology – extending the life of the diaphragms
• Class 1000 clean room manufacturing & testing
• DI water tested, nitrogen purged and double bagged
• Self priming
• Explosion-Proof operation
• Maintenance Friendly
• Air Control Options – internal or external

Applications:

Chemical Management: semi-conductor & electronics
Slurry Management: Polishing wafers
Solvents: transfer and circulation of high purity solvents and non-corrosive liquids
Other: applications that require high purity pumping solutions

High Purity Pumps

F-Series High Purity:

• Port Sizes of ¼”, 3/8” ½” ¾” & 1”
• Check Valve option – Flat or Ball
• Flaretek®, ANSI Flange & FNPT connections available
• Flow rates of 1 – 35 gpm
• Air pressure range: 20 – 100 PSI
• Temperatures up to 212° F

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F-Series Ultra High Purity (UHP):

The UHP Series contains NO internal metallic components. In fact, the only metal present in the F-Series UHP Pumps are the tie rods, which are coated and capped with PTFE, leaving no metal in the liquid path. Diaphragms with integrated outer center disks are also used to eliminate any potential leak path.

• Available in ¾” Flaretek®, ANSI Flange & FNPT connections
• Check Valve option – Flat or Ball
• Flow rates up to 12.5 gpm
• Air pressure range: 20 – 100 PSI
• Temperatures up to 212° F

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Figure 1

Phantom Series (PDP):

The Phantom Series contains NO internal or external metallic components. The PDP Series was designed specifically for the safe transfer and recirculation of semiconductor process chemistries when purity and reliability are the paramount concern.

• Port Sizes of ½”, ¾” & 1”
• Flaretek® & FNPT liquid connections
• Ultra High Purity PTFE/PFA wetted construction
• Absolutely NO metallic components
• Hard Seal diaphragm technology (see Figure 1) 
• Leak sensor option
• Compact design with quick changing base
• Flow rates: 1 – 16 gpm
• Air pressure range: 30 - 75 PSI
• Temperatures up to 176° F

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Slurry Service (SDP):

Slurry Service Pumps are designed to transfer and re-circulate abrasive process slurries when high purity levels are required. The unique “flex” design at the liquid sealing areas eliminates any potential leaks. These pumps have proven to perform with very little agglomeration.

• Port sizes of 3/8”, ½” ¾” & 1”
• Flaretek® ANSI Flange & FNPT liquid connections
• Flow rates: 1 – 16 gpm
• Air pressure range: 30 - 75 PSI
• Temperatures up to 176° F
• Easily rebuilt and maintained

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Figure 2

Electro Polished Series (EP):

EP Series Pumps are specifically designed for transferring ultra high purity solvents and other non-corrosive liquids that are compatible with 316 Stainless Steel.

• 20 Ra Electro Polished Stainless Steel wetted components
• PTFE Elastomers
• Multiple pump control designs are available
• Ports sizes of ½”, ¾” & 1 “
• FNPT (standard), Swagelok®, VCR®, Sanitary Clamp, Tube & ANSI Flange liquid connections (see Figure 2) 
• Flow rates up to 35 gpm
• Air pressure range: 20 – 100 PSI
• Temperatures up to 212° F

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Dampeners:

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For more high purity pump information, visit our product catalog.